∅=empty set.
{∅}=set which contains ∅ as element.
{ ∅ , {∅} } =set which contains ∅ and {∅} as element.
{ ∅ , {∅}, {∅ , {∅} } } = set which contains ∅ , {∅} and {∅ , {∅} } as element.
Hence,
1) $\phi$ $\Rightarrow$ Cardinality=0
2) { $\phi$} $\Rightarrow $Cardinality=1
3) { $\phi$ , { $\phi$} } $\Rightarrow$ Cardinality=2
4) { $\phi$, { $\phi$} , { $\phi$, { $\phi$ } } } $\Rightarrow $ Cardinality=3